8 mm x 8 mm chip size

Substrate: 200 µm thick silicon
Absorber: 3 µm high gold

Tolerance: +/- 10%

5.0, 4.0, 3.2, 2.5, 2.0, 1.6, 1.3, 1.0, 0.9, 0.8, 0.7, 0.6, 0.5, 0.45, 0.4, 0.35, 0.3 (17 steps)

10 mm x 10 mm chip size
Holder with saphire glass cover: 40 mm x 30 mm x 5 mm

Substrate: 200 µm thick silicon
Absorber: 8 µm high gold

Tolerance: +/- 15%

4 quadrants of 4 mm x 4 mm each; 2 modified Siemens stars featuring circular holes and 5 parallel gold lines, with line and space widths of 12 µm, 10 µm, 8 µm, 6 µm, 5 µm, 4 µm, and 3 µm at different angles. Smallest line width: 3 µm. Smallest hole diameter: 5 µm